Hot N2 Unit System 
Hot N2 System Application

Acquired China gas heating and accelerate powdwer crystalized patent
China patent number：ZL-2018-2-0836958.8

Best scheme for prevent powder blockage

► Heating Jacket ＋ Hot N2 Unit System

Huge effectiveness

CVD Process
►PM Cycle Extension - 3Month → 6Months
Dry ETCH Process
►PM Cycle Extension - 6Month → 9Months

Before

After