ERM Pump Energy Efficient

Bernoulli’s principle: the air flow speed getting slow when go through big cross-section area，but the speed will be accelerate when go through small area under high pressure，this phenomenon just like water flow to the river，water flow fast in narrow space and getting slow on plain ground, same thing, this phenomenon base on the energy of liquid flow unchanged。

Vacuum generator principle is according to compressor air, the pressure will be lower because of high speed vacuum air flow when compressed air flow into spray outlet.

ERM(PUMP energy saving) keep release pump pressure on pipping side，to cause vacuum for keep LP5 negative pressure from gas outlet。Thus can reduce LP5 pressure，Obviously saving LP4 rotation which consume energy。We can see this picture that the chamber space saving of LP1-LP5，and the pressure will be getting huge from back side。

<install required>
Suitable for (Load Lock) process powder less Pump上。
This tool (depends)supply CDA or N2 gas pressure at least 5kg。